'On the use of Resonance Enhanced Multiphoton Ionisation (REMPI) for probing hydrogen atoms in Diamond Chemical Vapour Deposition using a Hot Filament Reactor'

On the use of Resonance Enhanced Multiphoton Ionisation (REMPI) for probing hydrogen atoms in Diamond Chemical Vapour Deposition using a Hot Filament Reactor

S.A. Redman, S.R. Langford, K.N. Rosser and M.N.R. Ashfold

Proc. SPIE 3484, 34-42 (1998).

We illustrate advantages (and some of the shortcomings) of H atom multiphoton ionisation (MPI) spectroscopy, resonance enhanced at the two photon energy by the ²s₁1; ²S_1/2 state, as a means of obtaining spatially resolved, relative H atom concentrations and gas temperature profiles within a hot filament CVD reactor, and investigating the way in which these parameters depend on process conditions.