R.J. Lade, D.J. Munns, S.E. Johnson, P.W. May, K.N. Rosser and M.N.R.

Ashfold.

 'Investigation of Hydrogenated Amorphous Carbon (a-C:H) Films produced by ArF (193 nm) Laser Ablation ofPoly(methyl methacrylate)'

Diamond Rel. Mater, 7 (1998) 699-703.

 Hydrogenated amorphous carbon (a-C:H) films have been deposited on Si, quartz and NaCl by pulsed 193 nm laser ablation of poly (methyl-methacrylate) under vacuum. Wavelength dispersed studies of the visible emission accompanying the ablation plume show it to be dominated by the Balmer series of atomic hydrogen. The extent of the emission plume suggests that electronically excited H atoms are created in flight, probably via collisions between much larger particles produced in the primary ablation process. Such a picture accords with the results of microcombustion analysis and infrared transmission spectroscopy both of which indicate that, compared to the original target material, the deposited a-C:H film is deficient in H (and O).


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