Dr Paul May, S103A, email: paul.may@bris.ac.uk
Prof Mike Ashfold, W312, email: mike.ashfold@bris.ac.uk
This course consists of 4 lectures concerned with Plasma Processing of Semiconductor Materials. A rough outline of the lectures is:
Recommended textbook: 'Dry Etching for VLSI', A.J. van Roosmalen, J.A.G. Baggerman and S.J.H. Brader, (Plenum Press, New York, 1991) - available from the Chemistry Library.
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