CVD Diamond Deposition Reactors
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HF Reactor 1 - a small hot filament CVD diamond reactor for studies of unusual gas chemistries and n-type doping. This is limited to substrate areas of about 1 cm2, and has a diamond growth rate around 0.5 μm h-1. But it is a very cheap, flexible and reliable reactor suitable for proof-of-principle experiments and trying out novel ideas. |
HF Reactor 2 - another small hot filament CVD diamond reactor dedicated for depositing B-doped diamond films using diborane as the B supply. This reactor is also limited to substrate areas of about 1 cm2, and also has a diamond growth rate around 0.5 μm h-1. The B content of the films can be controlled between 1018 and 1021 cm-3, which is from lightly semiconducting to near-metallic conductivity. |
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| 'The Toaster' - a larger hot filament reactor which can either deposit onto large area single wafers up to 4" in diameter, or can be converted to deposit diamond onto wires and fibres. The machine was originally designed by the company Thomas Swan, but has been modified substantially since then. In large-area mode, the wafer is held vertically close to multiple spring-loaded tungsten filaments. In wire mode, it holds two filaments, each of which is surrounded by 30-40 tungsten wires (10 cm long) whch can be simultaneously coated in diamond. In both modes, the growth rate is still only 0.5 μm h-1, but it is fully interlocked so it can be left running continuously for many days allowing diamond film thicknesses of 100 μm to be deposited. | MW Reactor 1 - a 2 kW microwave PECVD reactor with a substrate area of about 2 cm2 which can grow undoped diamond at up to 20 μm h-1. (a) magnetron, (b) waveguide, (c) optical pyrometer, (d) gas inlet, (e) vacuum exhaust pump, (f) gas inlet, (g) vacuum chamber, (h) water cooled base plate, (i) water cooling system. |
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 .jpg "Ripples in the DC plasma") |
MW Reactor 2 - a 2 kW microwave plasma system for plasma diagnostic studies. This has been donated to us by Element Six and set up to allow interrogation of the plasma and dark-space via various forms of emission and laser spectroscopy. |
The 'Minion' - a DC plasma deposition system for growing large-area (6") polycrystalline diamond wafers. |