MSc Physics of Advanced Semiconductor Materials

Plasmas and Plasma Processing

Dr Paul May, S103A, email: paul.may@bris.ac.uk

Prof Mike Ashfold, W312, email: mike.ashfold@bris.ac.uk

Introduction

This course consists of 4 lectures concerned with Plasma Processing of Semiconductor Materials. A rough outline of the lectures is:

1. Plasmas and Plasma-Surface Interactions (Dr Paul May)
2. Plasma Diagnostics: Optical Spectroscopy (Prof Mike Ashfold)
3. Plasma Diagnostics: Mass Spectroscopy (Prof Mike Ashfold)
4. Plasma Diagnostics: Electron Temperatures and Ion Energy Distributions (Dr Paul May)

Recommended textbook: 'Dry Etching for VLSI', A.J. van Roosmalen, J.A.G. Baggerman and S.J.H. Brader, (Plenum Press, New York, 1991) - available from the Chemistry Library.

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